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| 名稱:六氟乙烷 型號: | | | | |
六氟乙烷C2F6
商品詳細(xì)介紹 |
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A colorless,nonflammable,compressed gas.(一種無色不燃壓縮氣體) |
Formula(分子式): |
C2F6 |
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Molecular weight(分子量): |
138.01g/mol |
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Boiling point(沸點): |
-78.2℃ |
-108.76°F |
Melting point(熔點): |
-100.7℃ |
-149.27°F |
Vapor pressure(蒸汽壓): |
2965KPa(21.1℃) |
430Psia(70°F) |
Specific volume(比容): |
0.174m3/kg(21.1℃,101.325KPa) |
2.8ft3/lb(70°F,14.696psia) |
UN Number(UN號碼): |
UN2193 |
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DOT Classification(DOT類別): |
2.2(Nonflammable Gas)(不燃性氣體) |
DOT Lable(DOT標(biāo)簽): |
NON-FLAMMABLE GAS(不燃性氣體) |
Grsde(級別): |
5N |
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Purity(純度): |
99.999% |
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純度規(guī)格 |
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Impurity(非組分): |
Specification(標(biāo)準(zhǔn)) |
Oxygen(氧): |
≤2.0 ppmv |
Nitrogen(氮): |
≤8.0 ppmv |
Carbon Dioxide(二氧化碳): |
≤0.5 ppmv |
Carbon Monoxide(一氧化碳): |
≤0.5 ppmv |
Other Organics(其他有機物): |
≤0.1 ppmv |
Water(水): |
≤1.5 ppmv |
Acidity as HF(酸化物,如氟化氫): |
≤0.1 ppmv |
包裝 |
容積 |
重量 |
連接閥門 |
小鋼瓶 |
44L |
43Kg |
CGA660 DISS716 |
應(yīng)用:刻蝕氣體/等離子刻蝕
| | 點擊次數(shù):2827 | |
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